Features
- Materials: Ti, Cr, Ag, Au, Ni, Al, Cu etc.
- Automatic PLC operated vacuum control system with touch screen
- Single and multilayer deposition
- Programmable recipes and auto deposition sequence
- In-line safety interlocks
- Four pocket e-beam source (4cc pockets)
- Substrate rotation
- Cryo pump and roughing pump
- Base vacuum 2 x 10-7 Torr or better
