Veeco Dektak 150 surface profiler
Instrument Details
Features
- 3D topographical surface map rather than just traditional line scan
- Larger sample (up to 150 mm wafer) and longer scan (up to 55 mm)
- Vertical resolution - 1 ångström
- Vertical Range - 524 um
- Powerful and user-friendly software
- Stylus radius- 12.5 um, 5.0 um, 2.5 um
Surface profiler
NUcore RESERVATION
Facility Contact
Dr. Xinqi Chen
Keck-II Facility Manager
Office: Tech, #AG95
847-491-5505 / xchen@northwestern.eduLocation
Technological Institute AG72