Features
SEM Column
- Schottky FEG source
- Resolution: < 5 nm
Imaging Detectors
- Standard lower SE detector for topographical information.
- In-lens detector for ultra high-resolution imaging with energy filtering, including SE and HA-BSE.
- High-sensitivity dedicated BSE detector for high compositional contrast even at low kV.
- GBSH-S (GENTLEBEAM™ Super High mode) for improved low kV imaging, up to 5kV bias.
- Low-vacuum BSE mode for enhanced charge suppression.
Analytical Detectors
- EDS and WDS: integrated Oxford Ultimax 65 mm2 SDD EDS detector and Oxford Wave 700 with five diffraction crystals for combined EDS/WDS analysis, including WDS mapping.
Other
- Super Hybrid Lens (SHL), allows for observation of magnetic materials even at short working distances, and reduces aberrations to improve resolution, especially at low kV.
