Features

SEM Column 

• Schottky field emission electron source (FEG)  

• Resolution: <1 nm  

Imaging Detectors 

• Lower SE detector for topographic imaging  

• Five-segment BSE detector for compositional contrast and 3D reconstruction  

• In-lens SE, HA-BSE, and LA-BSE detectors for ultra-high-resolution imaging  

• Low-vacuum imaging for charge suppression  

• Cathodoluminescence (CL) imaging for crystallinity, defects, and optical properties  

• Beam deceleration mode (up to 2.5 kV bias) for enhanced low-kV imaging  

• STEM-in-SEM detector for BF- and DF-STEM imaging (<30 kV)  

• Image resolution up to 40,960 × 30,720 pixels  

Hitachi SU8700

Analytical Detectors 

• EDS: Oxford Ultim Max 170 mm² SDD and Ultim Extreme 100 mm² windowless detectors for quantitative elemental analysis, including low-kV and light-element analysis (down to Li)  

• EBSD: Oxford Symmetry S3 EBSD with Near-Axis TKD for high-resolution crystallographic characterization  

• Unity BEX: Combined BSE/X-ray detector for ultra-fast, high-resolution color imaging 

Facility Contact

Location

Technological Institute AB wing; AG83

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