Features
SEM Column
- Cold FEG source
- Resolution: < 5nm
Imaging Detectors
- Standard lower SE detector for topographical information.
- In-lens detectors for ultra high-resolution imaging with energy filtering, including SE, HA-BSE, and LA-BSE.
- Beam deceleration mode for improved low voltage imaging, up to 2.5 kV bias.
- STEM-in-SEM detector for low voltage (<30kV) BF- and DF-STEM imaging.
Analytical Detectors
- EDS: Oxford X-Max 80 mm2 SDD EDS detector and AZtec software for elemental characterization.
