Features
- Schottky field emission gun for high resolution and excellent beam stability
- Allows for true SE imaging of wet, insulating samples up to 4000Pa chamber pressure
- Standard E-T SE detector, solid-state BSE detector, 2 gaseous SE detectors and a gaseous BSE detector
- Resolution of <2nm @ 30kV in high vacuum, <2nm @ 30kV in ESEM and <3.5nm @ 3kV in Low Vacuum mode
- Automatic, programmable stage with 6” wafer capacity
- Integrated Oxford AZtec EDS and EBSD system
- NPGS pattern generation system for high-resolution electron beam lithography (eBL)
- High-speed beam blanking capabilities for lithography
- Integrated beam current measurement system
- Peltier variable temperature stage for humidity cycling experiments
FEI Quanta 650 ESEM
View the Quanta training video on our YouTube Channel
NUcore RESERVATION
