Features
SEM Column
- Schottky FEG source
- Resolution: < 10 nm
Imaging Detectors
- Standard lower SE detector for topographical information.
- Radially segmented BSE detector for compositional contrast and separation of LA-BSE and HA-BSE.
- Low-vacuum SE or BSE modes for enhanced charge suppression.
- ESEM mode up to 4000 Pa chamber pressure for hydrated samples or humidity/pressure-controlled experiments.
Analytical Detectors
- EDS and EBSD: Integrated Oxford Ultim Max 40 mm2 SDD EDS detector and Oxford Symmetry S2 EBSD detector for elemental and mineralogical characterization.
Other
- Heating stage for in situ experiments up to 950 deg. C.
- Electron beam lithography (eBL) system.
