Features

• Process chamber suitable for masks up to 9” x 9” or wafers up to Ø 12“ (Ø 300mm)
• Chucks available for 3 inch and 4 inch wafers
• Chucks available for 4 x 4 inch and 5 x 5 inch masks

Osiris CHEMIXX MASK 30 E

NUcore RESERVATION

Facility Contact

Main Contact: Shaoning Lu, PhD 
Office: Tech #FG71
(847) 491-3853 / email

Alternate Contact: Dr. Nasir Basit
(847) 467-6201 / email

Location