Features Three acid hoods – general purpose acid, no HF, and multiple wafer processing hood Nitrogen blow guns and DI water spray guns on each side Spin dryer DI water goose neck faucet and sink Cup sinks for acid waste
Facility ContactMain Contact: Shaoning Lu, PhD Office: Tech #FG71 (847) 491-3853 / email Alternate Contact: Scott Kreager (847) 491-4497 / email