Features
Spin-coater
- Maximum Spin Speed: 6000 RPM/s
- Maximum Ramp: 30000 RPM/s
- Speed Accuracy: <0.2 RPM
- Maximum substrate size that will fit in the bowl 200mm
- Recipe Storage: Virtually unlimited Recipes
Hotplates
- Temperature range: 49 ºC to 325 ºC
- Maximum temperature ramp up rate: 100 ºC/min
- Temperature Accuracy: 1% of setpoint
- Top plate dimensions: 9” X 9”
- Programs can be stored for each programmable hotplate: 31
