Features

• Designed to accommodate wafers up to 6″ in diameter
• Timer to control the exposure time
• Seven shelf positions, 1 inch apart
• UV Mercury Electrodeless Lamp

Inpro Technologies F300S

NUcore RESERVATION

Facility Contact

Main Contact: Serkan Butun, PhD
Office: Tech, FG71
(847) 467-5959 / email

Alternate Contact: Scott Kreager
(847) 491-4497 / email

Location