Features
- Wafer Size: 3”, 4”, and 6” diameter (pieces can be processed)
- Ramp up rate: Programmable, 10 ºC to 200 ºC per second
- Ramp down rate: Programmable, 10 ºC to 125 ºC per second
- Operating temperature: 150 ºC – 1100 ºC
- Gases supplied: H2/N2, O2, Ar, N2
- Thermocouple temperature accuracy: ±0.5 ºC
- Pyrometer temperature accuracy: ±1 ºC
- High wafer-to-wafer repeatability
