Features

• Spin-coat e-beam resist
• Puddle develop
• Hotplate bake

Coat/Bake/Develop Station

NUcore RESERVATION

Facility Contact

Main Contact: Serkan Butun, PhD
Office: Tech, FG71
(847) 467-5959 / email

Alternate Contact: Ying Jia, PhD
(847) 467-2142 / email

Location

Technological Institute FG70