Features

• Wafer size: up to 200 mm
• Turbo pump backed by a dry roughing pump
• RF Power: 13.56 MHz, 300 W
• Six gas lines: CF4, CHF3, SF6, O2 (20 sccm), O2 (200 sccm), Ar/N2

Samco RIE-10NR

NUcore RESERVATION

Facility Contact

Main Contact: Anil Dhote,PhD
Office: Cook Hall, 4087
(847) 467-2066 / email

Alternate Contact: Dr. Nasir Basit
847-467-6201 / email

Location

Technological Institute FG70