Features

• Wafer size: 100 mm
• Bosch Process License
• Pegasus Source with 3kW RF Generator
• Gases: C4F8, SF6, O2, and Ar
• Processes: Smooth Sidewall (roughness<50 nm), Small Trench (2-3 micron), and Fast Etch Rate (>15 micron/min)

STS LpX Pegasus

NUcore RESERVATION

Facility Contact

Main Contact: Shaoning Lu, PhD
Office: Tech, #FG71
(847) 491-3853 / email

Alternate Contact: Dr. Nasir Basit
(847)-467-6201 / email

Location

Technological Institute FG70