Features

• Substrate size: Up to four 4-inch wafers
• Fast pumping with cryo-pump and dry roughing pump
• Three shielded sources with 2 kVA power supply
• Substrate heating/cooling possible

Denton Vacuum Explorer 14

NUcore RESERVATION

Facility Contact

Main Contact: Dr. Nasir Basit
Office: Tech, FG73
847-467-6201 / email

Alternate Contact: Anil Dhote, PhD
847-491-5959 / email

Location

Technological Institute FG70