Features

• Maximum Spin Speed: 6000 RPM
• Maximum Ramp: 30000 RPM/s
• Samples up to 200mm
• Programmable spin recipes and storage
• Photoresist bake plates
• Photoresist Developing
• Ultrasonic cleaner
• DI water and nitrogen guns

Photolithography Hood

NUcore RESERVATION

Facility Contact

Main Contact: Anil Dhote, PhD
Office: Cook Hall, #4087
847-491-5959 / email

Alternate Contact: Scott Kreager
(847) 491-4497 / email

Location