Features

• Mercury arc lamp
• Submicron resolution
• Manual x, y alignment stage, fine align
• Manual tray loading feature
• Splitfield / Singlefield optical microscope
• Simple topside mask loading
• Substrate size up to 4” diameter

Mask Aligner – Q4000

NUcore RESERVATION

Facility Contact

Main Contact: Anil Dhote, PhD
Office: Cook Hall, #4087
847-491-5959 / email

Alternate Contact: Scott Kreager
(847) 491-4497 / email

Location