Features

• Front and backside optical alignment
• 3″ wafer chuck
• 5″x5″and 4″x4″ masks can be mounted on the holders

Mask Aligner – MABA6

NUcore RESERVATION

Facility Contact

Main Contact: Anil Dhote, PhD
Office: Cook Hall, #4087
847-491-5959 / email

Alternate Contact: Diego Santiago De La Vega
(847) 491-2015 / email

Location