Features

• High lateral resolution (< 50 nm) with the new Nanoprobe 50 for elemental mapping
• Mass resolution > 30,000 and superior sensitivity for impurity detection
• Super high resolution for depth profiling with Cs, Oxygen, and Ar cluster gun
• Highly efficient charge neutralizer for insulating samples
• Comprehensive raw data collection for post data process
• Huge sample holder for multiple samples mounting
• Unique delayed extraction mode for high transmission with high lateral and high mass resolution simultaneously
• Unmatched dynamic range and detection limits
• New flexible, push-button, closed-loop sample heating and cooling system for long-term operation without user interaction (-150 to 600C)
• Sophisticated SurfaceLab 7 software including fully integrated Multivariate Statistical Analysis (MVSA) software package

ION TOF M6: Time-of-Flight Secondary Ion Mass Spectrometry (ToF-SIMS)

NUcore RESERVATION

Facility Contact

Location