Features
- High resolution SEM 1.6 nm at 1 kV
- High resolution FIB 4 nm at 30 kV
- Up to 90nA large ion probe current
- Vector scan system
- 3 deposition cartridges (C, W and Pt)
- Oxford Symmetry EBSD Detector
- Oxford Ultimax EDS detector
- In-situ lift-out system (Omniprobe 400)