Features

• Wire bonding, flip-chip underfill, device encapsulation, and decapsulation
• SEM/TEM sample cleaning for carbonaceous contamination removal and oxide reduction
• Surface treatment before biomedical coating and improve the hydrophilicity of medical implants
• Optics, glass, and substrate cleaning before epoxy bonding
• Photoresist ashing, descum, and silicon wafer cleaning
• PDMS, microfluidics, glass slides, and lab-on-a-chip
• Improve bonding for metal-to-metal or composite
• Improve bonding for plastic, polymer, and composite materials

SPF Tergeo-EM Plasma Cleaner

The Tergeo-EM is a versatile, tabletop plasma cleaning system for Electron Microscopy, designed to remove hydrocarbon contamination and modify surfaces on TEM/SEM samples, grids, and holders using a completely customizable oxygen and/or argon plasma recipe. It features dual plasma modes (direct immersion & remote/downstream), supports TEM holders brands (JEOL), offers automatic & pulsed operation, and includes a plasma sensor for precise control, making it ideal for cryo-EM prep and sensitive material cleaning. 

Facility Contact

Dr. Paul Smeets
TEM/FIB Facility Manager
Office: Tech, #AG96
847-491-7807 / paul.smeets@northwestern.edu

Location