Features
SEM Column- Resolution of 0.6 nm @ 2 – 15 kV; 0.7 nm @ 1 kV
PFIB Column
- Beam currents 1 pA – 2.5 µA
- Four ion sources (Xe, Ar, O and N), with only 10 min switching time between sources
- <20 nm resolution @ 30 keV (Xe ions)
Multiple Imaging Detectors
- for secondary electron (SE), secondary ion (SI) and backscatter electron (BSE) imaging
- Retractable STEM detector
Analytical Detectors
- Oxford large area (100 mm2) EDS and Oxford Symmetry 3 Electron Backscatter Diffraction (EBSD) detector
Deposition of carbon, platinum, and tungsten chemistries:
- MultiChem Deposition System: Mixing gases and controlling flow rates to allow for multiple local gas chemistries
Cryogenic Capabilities
- Cryo-stage to cool samples down to ~90 K
