Features

• Five gas injection systems for etching / deposition
• ibss Group's GV10x Downstream Plasma Asher
• STEM detector
• Raith ELPHY ion beam lithography (IBL) capabilities
• Lift-out tools for TEM and Atom Probe Tomography (APT) samples
• Vibration isolation table

FEI Helios Nanolab SEM / FIB

NUcore RESERVATION

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