Deposition Instruments

Atomic Layer Deposition – Arradiance GEMStar XT-P

E-beam Evaporator – AJA

Parylene Coater – SCS Labcoter2 Parylene Deposition System

Plasma Enhanced Chemical Vapor Deposition System (PECVD) – Samco PD-220NL

Plasma Enhanced Chemical Vapor Deposition (PECVD) – STS LpX CVD

Sputter I & II – AJA Orion

Thermal Evaporator – Denton Vacuum Explorer 14

ALD – Savannah S100 (Cook)

E-Beam Evaporator – Auto 306 (Cook)

E-Beam Evaporator – Auto 500 (Cook)

Sputter III - AJA - Niobium (Cook)

Quantum Deposition System - Plassys (Cook)