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Hitachi Field Emission SEM to be Installed

Hitachi's cold field emission technology with double condenser optics ensures not only the highest resolution, but also full control on probe currents from 1pA to over 5nA - ideal for both, observation of even the most sensitive specimens, but also for elemental analysis (EDX) where today's SDD detectors easily will achieve several 10000 counts per second.


The SU8030 features a large specimen chamber and is equipped with the triple detector super ExB system, Oxford X-max 80 SDD EDS detector and standard Everhart-Thornley SE detector. The SU8030 offers spatial resolution of 1.0 nm at 15kV and 1.3 nm at 1kV and 5-axis computer controlled stage.